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Sub-nanometer thin Conformal Aluminum Oxide Coating Created by Interconversion of SiO2 via Hydrogen Plasma-assisted Atomic Layer Deposition. (arXiv:2111.00054v1 [cond-mat.mtrl-sci]) http://arxiv.org/abs/2111.00054
Sub-nanometer thin Conformal Aluminum Oxide Coating Created by Interconversion of SiO2 via Hydrogen Plasma-assisted Atomic Layer Deposition. (arXiv:2111.00054v1 [cond-mat.mtrl-sci]) http://arxiv.org/abs/2111.00054