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Development of a Selective Wet-Chemical Etchant for 3D Structuring of Silicon via Nonlinear Laser Lithography. (arXiv:2309.12328v1 [physics.app-ph]) http://arxiv.org/abs/2309.12328
Development of a Selective Wet-Chemical Etchant for 3D Structuring of Silicon via Nonlinear Laser Lithography. (arXiv:2309.12328v1 [physics.app-ph]) http://arxiv.org/abs/2309.12328