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Application of Convolutional Neural Network to TSOM Images for Classification of 6 nm Node Patterned Defects. (arXiv:2211.12596v1 [cond-mat.mes-hall]) http://arxiv.org/abs/2211.12596
Application of Convolutional Neural Network to TSOM Images for Classification of 6 nm Node Patterned Defects. (arXiv:2211.12596v1 [cond-mat.mes-hall]) http://arxiv.org/abs/2211.12596